Gca stepper manual

 · About. Our GCA wafer stepper is an i-line ( nm) step and repeat exposure tool for doing lithography that requires high resolution and/or critical alignment. The system has been modified to accept piece parts (down to ~15 mm x 15 mm) up to 6” diameter wafers using manual wafer loading. The maximum square die size is mm x mm. GCA Stepper X-Y Stage Laser Interferometer GCA Reticle MEBES Mask Making User Interface Basic Stepper Jobs Advanced Stepper Jobs Irradiance Measurement Best Focus Exposure Baseline Correction Automatic Wafer Alignment System Canon APA i1 Stepper Canon Reticle Canon Stepper Jobs Mini Operation Manual ASML /90 Stepper. The GCA stepper is a 5x stepper with environmental control. Uses 5" x 5" x " soda lime photomasks. Features on the photomask are reduced 5x down to the printed feature si= ze. Excellent tool for larger feature sizes. GCA Stepper Manual - Rev J - 4/4/

Photolithography Protocol (GCA stepper) Draft Outline I. Chip Preparation II. Spin Coating III. Exposure IV. Development V. Metal Evaporation VI. Lift-off. I. Chip Preparation 1. Use 3” or 4” Silicon Wafer or cleave wafer using a wafer scriber. 2. Clean wafer (front and back) with acetone. Flush thoroughly with isopropanol (IPA) to avoid acetone residue. 3. due to unreliable performance and difficulty obtaining repair parts. It is operated in manual mode. It can accommodate substrates ranging from mm wafers to small pieces, with maximum thicknesses up to mm. The GCA AutoStep DSW i-line Wafer Stepper is an early’s era stepper using nm (i-line) light from a W Hg arc lamp. GCA AUTOSTEP STEPPER INSTRUCTIONS General information: Our stepper, located in the class area, is an i-line reduction tool. The wavelength of i-line emission is nm, and the stepper has a lens with a numerical aperture NA=, giving a resolution of µm and a depth of focus of ±1 µm. A 5” reticle is used, and the largest.

Model UV Light Intensity Energy Meter for Standard ASML, Nikon, Canon, GCA Rudolph Technology Wafer Steppers. oai image. This mask also included some auxiliary structures that made the job of manually locating global alignment targets easier for the GCA stepper layers. Note: The. Qty-3 GCA AutoStep Wafer Stepper, Each With Environmental Chamber Qty-5 Stepper Related Documentation/Manuals Reference Libraries.